상세 보기
Low-resistivity Molybdenum Nitride Thin Films Deposited by Atomic Layer Deposition Using a New Precursor
- 제목
- Low-resistivity Molybdenum Nitride Thin Films Deposited by Atomic Layer Deposition Using a New Precursor
- 저자
- 안지훈
- 발행일
- 2021-01-27
- 학회명
- The 28th Korean Conference in Semiconductors