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Growth Characteristics of Atomic Layer Deposited Iridium Thin Films with TICP and Oxygen

제목
Growth Characteristics of Atomic Layer Deposited Iridium Thin Films with TICP and Oxygen
저자
박태주
발행일
2023-02-14
학회명
제30회 한국반도체학술대회
개최지
강원도 하이원리조트

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