Effect of Al doping on structural and electrical properties of HfO2/ZrO2 layered structures for high-k applications

제목
Effect of Al doping on structural and electrical properties of HfO2/ZrO2 layered structures for high-k applications
저자
안지훈
발행일
2025-04-18
학회명
2025 한국세라믹학회 춘계학술대회