Lanthanum-substituted bismuth titanate for use in non-volatile memories

  • Park, BH; 
  • Kang, BS; 
  • Bu, SD; 
  • Noh, TW; 
  • Lee, J; 
  • 외 1명
Citations

WEB OF SCIENCE

2,287
Citations

SCOPUS

2,338

초록

Non-volatile memory devices are so named because they retain information when power is interrupted; thus they are important computer components. In this context, there has been considerable recent interest(1,2) in developing non-volatile memories that use ferroelectric thin films-'ferroelectric random access memories: or FRAMs-in which information is stored in the polarization state of the ferroelectric material. To realize a practical FRAM, the thin films should satisfy the following criteria: compatibility with existing dynamic random access memory technologies, large remnant polarization (P-r) and reliable polarization-cycling characteristics. Early work focused on lead zirconate titanate (PZT) but, when films of this material were grown on metal electrodes, they generally suffered from a reduction of P-r ('fatigue') with polarity switching. Strontium bismuth tantalate (SBT) and related oxides have been proposed to overcome the fatigue problem(3), but such materials have other shortcomings, such as a high deposition temperature. Here we show that lanthanum-substituted bismuth titanate thin films provide a promising alternative for FRAM applications. The films are fatigue-free on metal electrodes, they can be deposited at temperatures of similar to 650 degrees C and their values of P-r are larger than those of the SBT films.

키워드

SRBI2TA2O9 THIN-FILMS; ELECTRICAL-PROPERTIES; FERROELECTRIC CAPACITORS; HETEROSTRUCTURES; DEPOSITION; FATIGUE; LAYER
제목
Lanthanum-substituted bismuth titanate for use in non-volatile memories
저자
Park, BH; Kang, BS; Bu, SD; Noh, TW; Lee, J; Jo, W
DOI
10.1038/44352
발행일
1999-10
유형
Article
저널명
Nature
권
401
호
6754
페이지
682 ~ 684