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Plasma Enhanced Atomic Layer Deposition of MoCx Thin Films Using a Novel Mo Precursor
- 제목
- Plasma Enhanced Atomic Layer Deposition of MoCx Thin Films Using a Novel Mo Precursor
- 저자
- 안지훈
- 발행일
- 2025-11-25
- 학회명
- 8th International Conference on Advanced Electromaterials