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Effect of Azole-Free Inhibitors on Cu Dissolution in H2O2 Based Wet Etching Solutions During Metal Hard Mask Removal: Experimental and Theoritical study
- 제목
- Effect of Azole-Free Inhibitors on Cu Dissolution in H2O2 Based Wet Etching Solutions During Metal Hard Mask Removal: Experimental and Theoritical study
- 저자
- 김병현
- 발행일
- 2025-09-11
- 학회명
- 17th Symposium on Ultra Clean Processing of Semiconductor Surfaces
- 개최지
- KULeuven