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Area-Selective Atomic Layer Deposition with Locally Activated and Deactivated Methods toward Self-Aligned Bottom-Up Nanopatterning
- 제목
- Area-Selective Atomic Layer Deposition with Locally Activated and Deactivated Methods toward Self-Aligned Bottom-Up Nanopatterning
- 저자
- 김우희
- 발행일
- 2025-03-03
- 학회명
- The 5th Atomic Craft Workshop