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Effect of Sugar Alcohols on Silicon Oxide and Silicon Nitride Removal Rate as a Function of Carbon Number in STI CMP
- 제목
- Effect of Sugar Alcohols on Silicon Oxide and Silicon Nitride Removal Rate as a Function of Carbon Number in STI CMP
- 저자
- 박진구
- 발행일
- 2024-10-16
- 학회명
- ICPT 2024
- 개최지
- Wiesbaden