Residual Stress of GaN Epitaxial Layers Grown on Sapphire Substrates: Theoretical and Experimental Analyses

제목
Residual Stress of GaN Epitaxial Layers Grown on Sapphire Substrates: Theoretical and Experimental Analyses
저자
신동수
발행일
2012-05-23
학회명
16th International Conference on Metal Organic Vapor Phase Epitaxy
개최지
Busan