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Study on Scratch Generation during Copper Post-CMP Brush Cleaning for Sub-10 nm Semiconductor Manufacturing Devices
- 제목
- Study on Scratch Generation during Copper Post-CMP Brush Cleaning for Sub-10 nm Semiconductor Manufacturing Devices
- 저자
- 박진구
- 발행일
- 2024-11-14
- 학회명
- KISM 2024
- 개최지
- 부산