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Enhanced Oxide versus Nitride Selectivity in Area-Selective Atomic Layer Deposition of SiO2 Thin Films Combining Small Molecule Inhibitors with Atomic Layer Etching
- 제목
- Enhanced Oxide versus Nitride Selectivity in Area-Selective Atomic Layer Deposition of SiO2 Thin Films Combining Small Molecule Inhibitors with Atomic Layer Etching
- 저자
- 김우희
- 발행일
- 2024-12-10
- 학회명
- PacSurf 2024