Growth of Wafer-Scale Monolayer MoS2 Using Adsorbate-Controlled Atomic Layer Deposition

제목
Growth of Wafer-Scale Monolayer MoS2 Using Adsorbate-Controlled Atomic Layer Deposition
저자
박태주
발행일
2020-06-29
학회명
ALD/ALE 2020
개최지
Virtual meeting