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Selective Metal Blocking Using Vapor-Phase Self-Assembled Monolayers for Area-Selective Atomic Layer Deposition of Dielectrics
- 제목
- Selective Metal Blocking Using Vapor-Phase Self-Assembled Monolayers for Area-Selective Atomic Layer Deposition of Dielectrics
- 저자
- 김우희
- 발행일
- 2024-08-06
- 학회명
- ALD 2024