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Development of New Analysis Method with Ultrasonication for Incoming PVA Brush in Post-CMP Cleaning Process
- 제목
- Development of New Analysis Method with Ultrasonication for Incoming PVA Brush in Post-CMP Cleaning Process
- 저자
- 박진구
- 발행일
- 2018-08-23
- 학회명
- International Union of Materials Research Societies – International Conference on Electronic Materials 2018 (IUMRS-ICEM 2018)
- 개최지
- Daejeon Convention Center, Daejeon, Korea