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Anti-plasma and Corrosion for Robust-Mechanical Al/Al2O3/Y2O3 Multilayer Substrate

제목
Anti-plasma and Corrosion for Robust-Mechanical Al/Al2O3/Y2O3 Multilayer Substrate
저자
좌용호
발행일
2025-01-15
학회명
ISEPD
개최지
일본, 오사카

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