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A novel approach for PVA brush evaluation by contact area analysis during metal and oxide post-CMP cleaning
- 제목
- A novel approach for PVA brush evaluation by contact area analysis during metal and oxide post-CMP cleaning
- 저자
- 김태곤
- 발행일
- 2023-11-01
- 학회명
- International Conference on Planarization CMP Technology
- 개최지
- Kanazawa, Japan