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Enhanced the electrical properties of Zr1-xHfxO2 with Al doping using atomic layer deposition

제목
Enhanced the electrical properties of Zr1-xHfxO2 with Al doping using atomic layer deposition
저자
안지훈
발행일
2022-05-18
학회명
2022년도 한국재료학회 춘계학술대회

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