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Area-Selective Atomic Layer Deposition by Chemo-Selective Inhibition of Alkyl Aldehyde Molecules on Nitride Surfaces
- 제목
- Area-Selective Atomic Layer Deposition by Chemo-Selective Inhibition of Alkyl Aldehyde Molecules on Nitride Surfaces
- 저자
- 김우희
- 발행일
- 2024-10-30
- 학회명
- 한국표면공학회 추계학술대회