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Spatially Controlled Interfacial Engineering by Area-Selective Atomic Layer Deposition of Nb2O5 for High-Performance MIM Capacitors
- 제목
- Spatially Controlled Interfacial Engineering by Area-Selective Atomic Layer Deposition of Nb2O5 for High-Performance MIM Capacitors
- 저자
- 김우희
- 발행일
- 2026-06-02
- 학회명
- GCIM 2026