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Changes in Surface Chemical Characteristics of 4H-SiC for Better Cleaning Performance
- 제목
- Changes in Surface Chemical Characteristics of 4H-SiC for Better Cleaning Performance
- 저자
- 박진구
- 발행일
- 2024-04-24
- 학회명
- The Surface Preparation and Cleaning Conference 2024
- 개최지
- Arizona