상세 보기
Advanced Area-Selective Atomic Layer Deposition through the Discrete Feeding of Short-Chain Inhibitor Molecules
- 제목
- Advanced Area-Selective Atomic Layer Deposition through the Discrete Feeding of Short-Chain Inhibitor Molecules
- 저자
- 박태주
- 발행일
- 2021-10-06
- 학회명
- IUMRS-ICA 2021
- 개최지
- ICC Jeju(Hybrid)