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Low-Temperature Atomic Layer Deposition of High-Quality SiO2 Films Using Catalyst and In-situ Ozone Treatment
- 제목
- Low-Temperature Atomic Layer Deposition of High-Quality SiO2 Films Using Catalyst and In-situ Ozone Treatment
- 저자
- 김우희
- 발행일
- 2024-11-14
- 학회명
- KISM 2024