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Effect of Surfactant in Gas Dissolved Cleaning Solutions on Acoustic Bubble Dynamics
- Han, Soyoung;
- Yerriboina, Nagendra Prasad;
- Sahoo, Bichitra Nanda;
- Kang, Bong Kyun;
- Klipp, Andreas;
- ... Park, Jin Goo
Citations
SCOPUS
3초록
Megasonic cleaning is one of the promising technologies to remove the particles during semiconductor processing. Acoustic bubble cavitation plays a key role in removing the particles. In this work, the effect of an anionic surfactant sodium dodecyl sulfate (SDS) on a bubble in the presence of hydrogen dissolved DIW water was studied. The bubble dynamics were observed using a highspeed camera. It was found that with the increase of surfactant the bubble characteristics were changed very significantly. Several parameters affecting the bubble dynamics were investigated.
키워드
Acoustic cavitation; Anionic Surfactant; EUV mask cleaning; Megasonic cleaning; Bubbles (in fluids); Cleaning; Sulfur compounds; Bubble cavitation; Bubble characteristics; Bubble dynamics; Cleaning solution; Megasonic cleaning; Semiconductor processing; Sodium dodecyl sulfate
- 제목
- Effect of Surfactant in Gas Dissolved Cleaning Solutions on Acoustic Bubble Dynamics
- 저자
- Han, Soyoung; Yerriboina, Nagendra Prasad; Sahoo, Bichitra Nanda; Kang, Bong Kyun; Klipp, Andreas; Park, Jin Goo
- 발행일
- 2021-02
- 유형
- 정기학술지(Article(Perspective Article포함))
- 권
- 314
- 페이지
- 197 ~ 201
- 언어
- ENG
- 출판사
- Scitec Publications Ltd.
- 발행국가
- 스위스
- 분량
- 5 페이지
- ISSN
- E 1662-9779
P 1012-0394