Stabilization of polyvinyl acetal (PVA) brushes via effective removal of intrinsic impurities through advanced cleaning techniques

제목
Stabilization of polyvinyl acetal (PVA) brushes via effective removal of intrinsic impurities through advanced cleaning techniques
저자
김태곤
발행일
2025-10
유형
Proceeding
저널명
International Conference on Planarization/CMP Technology
페이지
205 ~ 207