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Stabilization of polyvinyl acetal (PVA) brushes via effective removal of intrinsic impurities through advanced cleaning techniques
- 제목
- Stabilization of polyvinyl acetal (PVA) brushes via effective removal of intrinsic impurities through advanced cleaning techniques
- 저자
- 김태곤
- 발행일
- 2025-10
- 유형
- Proceeding
- 저널명
- International Conference on Planarization/CMP Technology
- 페이지
- 205 ~ 207
- 언어
- ENG
- 출판사
- Chinese Mechanical Engineering Society (CMES)
- 분량
- 3 페이지