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Atomic Layer Deposition of MoO2 Using New Mo Precursor for High-k Rutile TiO2

제목
Atomic Layer Deposition of MoO2 Using New Mo Precursor for High-k Rutile TiO2
저자
안지훈
발행일
2025-11-25
학회명
8th International Conference on Advanced Electromaterials

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