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Parametric dependence of O(1D) flux and density in O2/Ar inductively coupled plasmas: effect of gas ratio and pressure
- 제목
- Parametric dependence of O(1D) flux and density in O2/Ar inductively coupled plasmas: effect of gas ratio and pressure
- 저자
- 김호준
- 발행일
- 2025-11-11
- 학회명
- Korean International Semiconductor Conference on Manufacturing Technology 2025
- 개최지
- Paradise Hotel Busan (Haeundae Beach), Busan, Korea