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Multifunctional Ru-AlN heating resistor films for high efficiency inkjet printhead
- Choi, Woo-Chang;
- Wan, Zhixin;
- Ahn, Ji-Hoon;
- Kim, Doo-In;
- Shin, Seung-Yong;
- 외 4명
WEB OF SCIENCE
1SCOPUS
1초록
Ru-AlN thin films were suggested as a novel multifunctional heating resistor film for non-passivated type thermal inkjet printer devices. Ru-AlN thin films were prepared by plasma-enhanced atomic layer deposition in order to intermix Ru and AlN precisely. When the Ru intermixing ratios were optimized, Ru-AlN films showed a favorable electrical resistivity (from 490.9 to 75.3 mu Omega cm) and minimized temperature coefficient of resistance (TCR) values (from 335 to 360 ppm/K). Moreover, the Ru-AlN films showed a strong oxidation resistant as compared with commercially used TaN0.8 films because the prepared Ru-AlN thin films had a typical nanocomposite structure. By applying electrical pulses to the heater device using Ru-AlN thin films for a Joule heating, a reliable operation was also proven.
키워드
- 제목
- Multifunctional Ru-AlN heating resistor films for high efficiency inkjet printhead
- 저자
- Choi, Woo-Chang; Wan, Zhixin; Ahn, Ji-Hoon; Kim, Doo-In; Shin, Seung-Yong; Moon, Kyung-Il; Park, Jin-Seong; Kwon, Jung-Dae; Kwon, Se-Hun
- 발행일
- 2014-05
- 권
- 32
- 호
- 2-3
- 페이지
- 240 ~ 245
- 언어
- ENG
- 출판사
- SPRINGER
- 발행국가
- 네덜란드
- 분량
- 6 페이지
- ISSN
- E 1573-8663
P 1385-3449