멀티프로브 오차분리법을 이용한 정밀 라인프로파일 측정 기술

초록

In this research, a precise on-machine line-profile measuring system that compensates for the motion-error from the linearguide, which can influence the accuracy of the measurement of the profile was developed. For this purpose, the principle of measuring the system model was used to analyze the compensating motion error component for line-profile and 3 types of MPES method (Integration-Method, the Fourier-Model-Method, and the Sequential-Method). The multi-probe-errorseparation-method (MPES) was applied to calculate the motion-error, which in turn was used to compensate for the measured linear-profile of the specimen. Lastly, the simulation conditions involving a multi-probe measurement system consisting of a reference-artifact, capacitive-sensor, and three displacement-sensors were designed and Monte-Carlo simulation was implemented for the evaluation of the 3 types of MPES method. Also, the simulation results obtained from the conventional measuring system and the proposed system were compared for the verification of the performance of the latter. Consequently, efficient compensation of the motion error appeared as possible and the applicability of the multi-probe measurement system was confirmed.

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