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Temperature-Driven Phase Formation with Novel Cyclopentadienyl-Based Precursors for BEOL-Compatible Hf1-xZrxO2 Ferroelectric Capacitors

제목
Temperature-Driven Phase Formation with Novel Cyclopentadienyl-Based Precursors for BEOL-Compatible Hf1-xZrxO2 Ferroelectric Capacitors
저자
안지훈
발행일
2026-01-30
학회명
The 33th Korean Conference in Semiconductors

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