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Wafer-scale crystalline MoS2 thin films with controlled morphology using pulsed metal-organic chemical vapor deposition at low temperature
- 제목
- Wafer-scale crystalline MoS2 thin films with controlled morphology using pulsed metal-organic chemical vapor deposition at low temperature
- 저자
- 안지훈
- 발행일
- 2022-01-26
- 학회명
- 29회 반도체학술대회