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Enhanced Electrical Properties of ZrO2-MoN-Based Capacitors with Ultrathin Buffer Layer
- 제목
- Enhanced Electrical Properties of ZrO2-MoN-Based Capacitors with Ultrathin Buffer Layer
- 저자
- 안지훈
- 발행일
- 2024-11-12
- 학회명
- Korean International Semiconductor Conference on Manufacturing Technology 2024