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Anti-plasma and corrosion-resistant Al/Al2O3/Y2O3 multilayer substrate

제목
Anti-plasma and corrosion-resistant Al/Al2O3/Y2O3 multilayer substrate
저자
좌용호
발행일
2024-11-08
학회명
2024년 추계학술대회
개최지
광주광역시

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