Effect of Surface Properties on the Vibrational Behavior of Electron Beam Driven Microactuators

초록

In this work, we investigated the mechanical behavior induced by electron beam irradiation inside an electron microscope on three different surfaces, by preparing not only the semiconductor Si surface but also an insulator (silicon nitride) and a conductor (Au). Mechanical behavior induced by surface modifications within electron microscopes have been rare. We fabricated microactuators that were operated by the electron beam of an electron microscope, without any external power source. However, previous experiments focused only on the dynamic behavior of semiconductor surfaces such as Si. Therefore, our current work may provide guidelines for future studies on interactions involving electron beams. © 2026 IEEE.

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