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Area-Selective Atomic Layer Deposition Using Aminosilane Precursors to Confer Oxide versus Nitride Selectivity
- 제목
- Area-Selective Atomic Layer Deposition Using Aminosilane Precursors to Confer Oxide versus Nitride Selectivity
- 저자
- 김우희
- 발행일
- 2023-04-14
- 학회명
- 2023 MRS Spring Meeting & Exhibit