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The Passivation Stability of Corrosion Inhibitors on the Surface of Cobalt for Sub 10 nm Device Application
- 제목
- The Passivation Stability of Corrosion Inhibitors on the Surface of Cobalt for Sub 10 nm Device Application
- 저자
- 박진구
- 발행일
- 2018-10-15
- 학회명
- 2018 International Conference on Planarization/CMP Technology