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Low-resistivity ALD MoOx Film Via Stabilization of Monoclinic Mo4O11 and MoO2 phase: Application for DRAM Capacitor Electrode
- 제목
- Low-resistivity ALD MoOx Film Via Stabilization of Monoclinic Mo4O11 and MoO2 phase: Application for DRAM Capacitor Electrode
- 저자
- 김우희
- 발행일
- 2025-12-10
- 학회명
- ICAMD 2025