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Optimization for Enhanced Electrical Properties of ZrO2/HfO2 Laminated Structure for Metal-Insulator-Metal Capacitors

제목
Optimization for Enhanced Electrical Properties of ZrO2/HfO2 Laminated Structure for Metal-Insulator-Metal Capacitors
저자
안지훈
발행일
2024-01-25
학회명
The 31th Korean Conference in Semiconductors

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