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Removal of EUV Exposed Hydrocarbon from Ru Capping Layer of EUV Mask Using the Mixture of Alkaline Solutions and Organic Solvents
- 제목
- Removal of EUV Exposed Hydrocarbon from Ru Capping Layer of EUV Mask Using the Mixture of Alkaline Solutions and Organic Solvents
- 저자
- 박진구
- 발행일
- 2019-02-15
- 학회명
- The 26th Korean Conference on Semiconductors
- 개최지
- 강원도 웰리힐리파크