수소화물 기상 성장법에 의해 성장된 마이크로 구리 구슬의 특성

Characteristics of copper microspheres grown by using mixed-source hydride vapor-phase epitaxy
  • Kim, Kyoung Hwa; 
  • Ahn, Ji-Hoon; 
  • Ahn, Hyung Soo; 
  • Yang, Min; 
  • Yi, Sam Nyung; 
  • 외 6명
Citations

SCOPUS

1

초록

Single-crystalline copper microspheres were grown at a high temperature of T = 1150 ◦C for 2 h by using the mixed-source hydride vapor phase epitaxy (HVPE) method in a simplified reactor interlinked in series without any separation between the growth and the source zones. The single-crystalline copper microspheres in the first growth process were grown on a metallic compound graphite substrate composed of 15 wt% copper and 85 wt% carbon by using a graphite boat filled with a mixed source of Al+Ga+Mg in the source zone. The copper microspheres coated by using the mixed source in the second growth process were grown on copper microspheres that had been grown on a quartz substrate with holes at a high temperature of T = 1150 ◦C for 2 h by using a graphite boat filled with a mixed source of Al+Ga+Mg in the source zone after cooling the single-crystalline copper microspheres. The copper microspheres grown were characterized by using scanning electron microscopy (SEM), energy dispersive spectrometry (EDS), and X-ray diffraction (XRD). © The Korean Physical Society. All rights reserved.

키워드

Al mixed materials; Copper microspheres; Mixed-source HVPE; Secondary growth; 마이크로 구리 구슬; 혼합 소스 수소 화물 기상법; AlN 혼합물질; 2차 성장
제목
수소화물 기상 성장법에 의해 성장된 마이크로 구리 구슬의 특성
제목 (타언어)
Characteristics of copper microspheres grown by using mixed-source hydride vapor-phase epitaxy
저자
Kim, Kyoung Hwa; Ahn, Ji-Hoon; Ahn, Hyung Soo; Yang, Min; Yi, Sam Nyung; Jeon, Injun; Cho, Chae Ryong; Jeon, Hunsoo; Lee, Jae Hak; Lee, Hyo Suk; Kim, Suck Whan
DOI
10.3938/NPSM.68.1052
발행일
2018-10
유형
Article
저널명
새물리
권
68
호
10
페이지
1052 ~ 1058