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Advanced Atomic Layer Deposition: Enhanced Oxidation Resistance and Film Properties of SiNx Films Using Highly Reactive N sources and Discrete Feeding Method
- 제목
- Advanced Atomic Layer Deposition: Enhanced Oxidation Resistance and Film Properties of SiNx Films Using Highly Reactive N sources and Discrete Feeding Method
- 저자
- 박태주
- 발행일
- 2025-02-14
- 학회명
- 제32회 한국반도체학술대회
- 개최지
- 강원도 하이원리조트