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Enhanced Deposition Selectivity of High-k Dielectrics by Vapor Dosing and Selective Removal of Phosphonic Acid Inhibitors
- 제목
- Enhanced Deposition Selectivity of High-k Dielectrics by Vapor Dosing and Selective Removal of Phosphonic Acid Inhibitors
- 저자
- 김우희
- 발행일
- 2024-05-24
- 학회명
- 한국반도체디스플레이기술학회 국내학술대회