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Optimized Electrical Properties of Molybdenum Thin Film Deposited by Atomic Layer Deposition for Next-Generation Interconnects
- 제목
- Optimized Electrical Properties of Molybdenum Thin Film Deposited by Atomic Layer Deposition for Next-Generation Interconnects
- 저자
- 안지훈
- 발행일
- 2023-10-31
- 학회명
- 7th International Conference on Advanced Electromaterials