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Plasma-enhanced atomic layer deposition of MoCx thin films using a liquid Mo precursor
- 제목
- Plasma-enhanced atomic layer deposition of MoCx thin films using a liquid Mo precursor
- 저자
- 안지훈
- 발행일
- 2025-06-04
- 학회명
- The 28th edition of the IEEE International Interconnect Technology Conference (IEEE IITC)