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Stable Ferroelectric Properties in 3 nm Hafnium-Zirconium-Oxide Thin Films by Shifting the Composition Window
- 제목
- Stable Ferroelectric Properties in 3 nm Hafnium-Zirconium-Oxide Thin Films by Shifting the Composition Window
- 저자
- 안지훈
- 발행일
- 2026-01-29
- 학회명
- The 33th Korean Conference in Semiconductors