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Study of Chemical-Physical Cleaning Technologies for Better Particle Removal Trapped on the Crystal Defects of 4H-SiC
- 제목
- Study of Chemical-Physical Cleaning Technologies for Better Particle Removal Trapped on the Crystal Defects of 4H-SiC
- 저자
- 김태곤
- 발행일
- 2024-10-11
- 학회명
- PRiME 2024
- 개최지
- Hawaii Convention Center, Honolulu, HI