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Impact of CMP Slurry Additives on Copper Pad Corrosion and Surface Topography of Interest to Cu-Cu Hybrid Bonding
- 제목
- Impact of CMP Slurry Additives on Copper Pad Corrosion and Surface Topography of Interest to Cu-Cu Hybrid Bonding
- 저자
- 김태곤
- 발행일
- 2024-10-17
- 학회명
- The 19th International Conference on Planarization/CMP Technology 2024
- 개최지
- Kurhaus Wiesbaden Germany