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Surface Inhibition of SiO2 Atomic Layer Deposition by Silane Self-Assembled Monolayers with Varying Chain Lengths
- 제목
- Surface Inhibition of SiO2 Atomic Layer Deposition by Silane Self-Assembled Monolayers with Varying Chain Lengths
- 저자
- 김우희
- 발행일
- 2025-11-11
- 학회명
- KISM 2025