상세 보기
Area Selective Atomic Layer Deposition with chemo-selective adsorption of short-chain alkylating inhibitors
- 제목
- Area Selective Atomic Layer Deposition with chemo-selective adsorption of short-chain alkylating inhibitors
- 저자
- 김우희
- 발행일
- 2021-10-28
- 학회명
- International Symposium on Innovation in Materials Processing (ISIMP 2021)
- 개최지
- Sono calm, Jeju