상세 보기
Enhanced Deposition Selectivity of High-k Dielectrics by Vapor-Dosed Self-Assembled Monolayer Inhibitors Combined with Selective Lift-Off
- 제목
- Enhanced Deposition Selectivity of High-k Dielectrics by Vapor-Dosed Self-Assembled Monolayer Inhibitors Combined with Selective Lift-Off
- 저자
- 김우희
- 발행일
- 2024-01-26
- 학회명
- 제 31회 한국반도체학술대회