A New Uncertain Decision Tree Method for Classifying Semiconductor Wafer Defect based on Multiple Wafer Maps

제목
A New Uncertain Decision Tree Method for Classifying Semiconductor Wafer Defect based on Multiple Wafer Maps
저자
김병훈
발행일
2019-06-26
학회명
The fifth International Conference of Interface between Statistics and Engineering (ICISE2019)
개최지
한양대학교 한양종합기술연구원